- photoresist lift-off technique
- метод зворотної фотолітографії
English-Ukrainian dictionary of microelectronics. 2013.
English-Ukrainian dictionary of microelectronics. 2013.
Lift-off (microtechnology) — Lift off process in microstructuring technology is a method of creating structures (patterning) of a target material on the surface of a substrate (ex. wafer) using a sacrificial material.It is an additive technique as opposed to more traditional … Wikipedia
Contact lithography — Contact lithography, also known as contact printing, is a form of photolithography whereby the image to be printed is obtained by illumination of a photomask in direct contact with a substrate coated with an imaging photoresist layer. Contents 1… … Wikipedia